Dr. Christian Reimann: studied Mineralogy, PhD in Material Science, joined Fraunhofer IISB/Germany in 2005, Head of Centre of Expertise for X-ray Topography at IISB since 2021. Moved to Rigaku as Director Business Development (SEMI, XRD, XRF) in 2024.
The Center of Expertise for X-ray topography (XRT) is introduced, a collaboration between the metrology tool manufacturer Rigaku and Fraunhofer IISB. The achievements in the field of SiC defect detection on full wafer scale with XRT will be presented: First the detection of threading screw dislocation (TSD) as highly reproducible and reliable measurement is shown, and second, we will introduce FastBPD detection: High-speed full wafer BPD density mapping, taking only 5 minutes for a 150mm wafer to complete. Based on this development, TSD and BPD detection by XRT was received a SEMI Standard, making this approach a common language for the SiC industry.