Lars Grieger, a seasoned semiconductor metrology professional with over 15 years of experience, currently leads segment marketing, business development, and key account management at Malvern Panalytical. His role involves crafting market strategies, overseeing technology acquisitions, and ensuring client success with MP's products. Lars, educated at RWTH Aachen and Imperial College London, has transitioned through various roles from Project Engineer to Product Manager. Passionate about scouting activities and fluent in 5 languages, Lars is esteemed for his technical prowess, strategic acumen, and adventurous spirit, making him a valuable asset in navigating the complexities of the semiconductor industry.
We present on the orientation determination of semiconductor crystals for several different steps of manufacturing (cutting, grinding,end control) towards a finalized wafer as well as applications in the front end for MOSFET trench orientation. Offcut magnitude precision is evaluated to 0.003° 1σ within 10s measurement time. This technology enables the ultra fast orientation of boules and a variety of frames allows precise orientation transfer to sawing or grinding equipment to maximize the yield from as grown crystals. Automation options range from manual to fully fab compliant with benchtop to workfloor sized installations at a throughput of more than 500k+ wafers per automated wafer tool per year.